Investigation of charge trapping and de-trapping in high-k dielectrics using pulsed-CV techniques: 2013

2013年12月1日星期日

1st Pulsed CV measurement (Some Analysis)

For pulsed CV measurement,

The whole figure of input voltage is shown below, since the pulsed measurement is very fast, each pulse lasts for about 200us , it is not clear to display results in one graph, so the results will be shown in segmentations.

input voltage plot

For the first segment, the input voltage and output voltage are plotted below:

First segment

In pulsed CV measurement, the output voltage is proportional to capacitance of the sample (the load resistor is relatively small). The above figure generally displays the shape of a CV plot. A detailed calculation for capacitance can be found here:

Some CV plots are shown below:

Segment 1:

segment 1 first down pulse

segment 1 first up pulse

segment 1 second down pulse

Segment 7:

segment 7 up pulse

segment 7 down pulse

Segment 13:

segment 13 up pulse

segment 13 down pulse

Segment 19:

segment 19 up pulse

segment 19 down pulse

2013年11月4日星期一

1st Pulsed CV measurement (Data)

Continued the experiment left from last time, the oscilloscope is changed and the data can be saved into pan driver.

The setting file of the measurement is shown below:

Anlg Ch State Units/Div Position Coupling BW Limit Invert Impedance
Ch 1: On 3.13V/ 0.0V DC Off Off 1M Ohm
Ch 2: On 13mV/ 0.0V DC Off Off 1M Ohm

Anlg Ch Probe
Ch 1: 1.00 : 1
Ch 2: 1.00 : 1

Trigger Mode Coupling Noise Rej HF Reject Holdoff
Edge Normal DC Off Off 60ns

Trigger Source Slope Level
Edge Ch 1 Either +500mV

Time Zoom Time Ref Main s/div Delay
Normal Off Center 100.0us/ 100.0us

Acquisition Realtime Vectors Inf Persist
High Res On On Off

Segmented Current Seg Actual # Segs Requested # Segs Sample Rate
On 1 19 19 100MSa/s

The data from channel 1 which is voltage in is recorded in a .csv file, please click here.
The data from channel 2 which is voltage out is recorded in a .csv file, please click here.

2013年10月28日星期一

1st Pulsed CV measurement

It's the first pulsed Capacitance-Voltage measurement on high-k materials. There were some problems. Segmentations of voltage curve were not shown correctly, and data cannot be saved into pan driver.

A pulsed CV measurement of silicon oxide MOS capacitor has been taken. The LabView programming environment is used to control instrumentation which allows rapid measurement of flat band voltage shifts in MOS capacitors incorporating high-k materials.

Pulsed CV measurement uses a programmable voltage source, capacitor and load resistor to form the circuit to plot capacitance voltage curve. The circuit is shown below:

Pulsed CV circuit

The input voltage V_i is a ramp voltage, the component under test (CUT) is shown in the dotted square, the output voltage V_o is measured across a very small load resistor. Calculation principle used in pulsed CV measurement is: